Model: CMX1
Part Numbers: X-XXXX-XXX, X-XXXX-XXX, X-XXXX-XXX, X-XXXX-XXX,
Compatible With: MX200, MX200 EthernetIP, MX200 PROFINET, MX Active Gauge EthernetIP Gateway
Features and Benefits:
- Lower drift, superior protection from deposition of process gases/li>
- Elimination of manual potentiometers and drift associated with electronics
- Fast warm-up, close temperature control, rapid response to changes
- Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
- Cannot be zeroed if pressure is too high or desired temperature not reached
- Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting
Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.
The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.
The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.
XacTorr® Capacitance Manometer
Capacitance Diaphragm Gauge (CDG) Cables
| Product Type | Capacitance Manometer |
| Differentiator | Heated or Unheaded |
| Analog or Digital | |
| Temperature | 45 °C |
| Pressure Range | 0.1, 10, and 1000 Torr |
| Accuracy | |
| 1 to 1000 Torr | 0.15% of reading |
| < 1 Torr | 0.25% of reading |
| Measurement Range | 4 decades |
| Temperature Effect | |
| On zero | 0.002% FS / °C |
| On span | 0.02% FS / °C |
| Exposed Materials | Inconel® and/or AISI 316L Stainless Steel |
| Overpressure | 17 psia or 125% of full scale, whichever is greater |
| Size | Large |
| Analog Communications | 0 to 10 V DC, 5k Ohm load | Digital Communications | DeviceNet™ |
| RS-485 | |
| Electrical Connection | |
| Analog/RS-485 | 9 Pin or 15 Pin D-Sub Connector |
| DeviceNet™ | 5-Pin "M12" connector |
| Power Supply/Consumption | |
| Power input at initial warm-up (analog) | 270 mA @ ±15 V DC |
| Power input at steady state (analog) | 175 mA @ ±15 V DC |
| 15 pin male Sub D model requires an additional 40 mA to power the internal relays (if energized). | |
| Certifications/Approvals | |
| EMC | Fully CE Certified to EMC Directive 89/336/EEC |
| Pin | Description |
| 1 | Analog Out (Ground) |
| 2 | RS-485 A (-) |
| 3 | SP2 NC |
| 4 | SP2 NO |
| 5 | SP1 Open Drain |
| 6 | Floating |
| 7 | Floating |
| 8 | Supply Voltage (0 to 10) V |
| 9 | Analog Out (0 to 10) V |
| 10 | RS-485 B (+) |
| 11 | SP2 Com |
| 12 | SP1 Source |
| 13 | Floating |
| 14 | Floating |
| 15 | Supply Voltage (-) |
| *0S1<CR> | Read vacuum measurement |
| *0R1<CR> | Read units of measurement |
| *0R2<CR> | Read SP1L and SP1H |
Assume address 0
Full list of commands is available in the instruction manual.
The MX2A has two set points. Set point 1 is an N-Channel 60 V MOSFET open collector. It has a maximum current rating of 1 A. The datasheet can be found at www.vishay.com/en/product/69958.
Set point 2 is a relay with a maximum switching voltage of 220 V DC (250 V AC) and a maximum switching current of 2 A. The datasheet can be found at www.te.com/catalog/pn/en/1393788-3.
| MX2A PN: -110, -116, -125 | MX2A PN: All Others |
| Nickel | Nickel |
| Glass | Glass |
| Gold | Gold |
| Tophet | Tophet |
| Cupron | Cupron |
| Solder | Stainless Steel |
| Housing | Aluminum |
| Electrical Connections | D-Sub 15-pin male |
| Weight with Sensor (typical) | 345 g (0.76 lbs) |
| Weight without Sensor | 181 g (0.40 lbs) |
| Certified to CAN/CSA C22.2 No. 61010-1-12 |
| CE certified to EN 61010-1, EN 61236-1, EN 55011 |
| RoHS compliant |
| IP40 |
| EAC certified |
| ISO 17025 accredited calibration optional |
| NIST traceable calibration optional |
Product Documentation
| MX2A Datasheet |
| MX2A Instruction Manual |
| Televac®️ Vacuum Calibration Tolerances |
3D Models (STEP Files)
| 2-8910-101 – MX2A 1/8″ NPT Stainless Steel |
| 2-8910-110 – MX2A 1/8″ NPT Nickel-Plated Brass |
| 2-8910-116 – MX2A NW16/KF16 Nickel-Plated Brass |
| 2-8910-130 – MX2A NW16/KF16 Stainless Steel |
Application Notes
Videos
| MX2A Product Overview Video |
| MX2A Demonstration Video |
| MX2A Sensor Replacement Video |
Tools
| Televac® Vacuum Measurement Converter |
| Web Serial Terminal |
Brochures
MX2A Thermocouple Active Vacuum
Gauge Quantity Discounts
| Quantity | Discount |
| 1 | List |
| 5 | 2% |
| 10 | 5% |
| 15 | 7% |
| 20 | 10% |
| 25 | 13% |
| 30+ | 15% |
D-Sub 15 Cable Quantity Discounts
| Quantity | Discount |
| 1 | List |
| 50 | 5% |
| 75 | 10% |
| 100+ | 15% |