Model: CMX1
Part Numbers: X-XXXX-XXX, X-XXXX-XXX, X-XXXX-XXX, X-XXXX-XXX,
Compatible With: MX200, MX200 EthernetIP, MX200 PROFINET, MX Active Gauge EthernetIP Gateway
Merkmale und Vorteile:
- Lower drift, superior protection from deposition of process gases/li>
- Elimination of manual potentiometers and drift associated with electronics
- Fast warm-up, close temperature control, rapid response to changes
- Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
- Cannot be zeroed if pressure is too high or desired temperature not reached
- Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting
Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.
The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.
The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.
XacTorr® Capacitance Manometer
Kapazitätsmembranmanometer (CDG) Kabel
| Product Type | Capacitance Manometer |
| Differentiator | Heated or Unheaded |
| Analog or Digital | |
| Temperatur | 45 °C |
| Pressure Range | 0.1, 10, and 1000 Torr |
| Genauigkeit | |
| 1 to 1000 Torr | 0.15% of reading |
| < 1 Torr | 0.25% of reading |
| Messbereich | 4 decades |
| Temperature Effect | |
| On zero | 0.002% FS / °C |
| On span | 0.02% FS / °C |
| Exposed Materials | Inconel® and/or AISI 316L Stainless Steel |
| Überdruck | 17 psia or 125% of full scale, whichever is greater |
| Size | Large |
| Analog Communications | 0 to 10 V DC, 5k Ohm load | Digitale Kommunikation | DeviceNet™ |
| RS-485 | |
| Electrical Connection | |
| Analog/RS-485 | 9 Pin or 15 Pin D-Sub Connector |
| DeviceNet™ | 5-Pin "M12" connector |
| Power Supply/Consumption | |
| Power input at initial warm-up (analog) | 270 mA @ ±15 V DC |
| Power input at steady state (analog) | 175 mA @ ±15 V DC |
| 15 pin male Sub D model requires an additional 40 mA to power the internal relays (if energized). | |
| Certifications/Approvals | |
| EMC | Fully CE Certified to EMC Directive 89/336/EEC |
| Stift | Beschreibung |
| 1 | Analog Out (Masse) |
| 2 | RS-485 A (-) |
| 3 | SP2 NC |
| 4 | SP2 NEIN |
| 5 | SP1 Offener Drain |
| 6 | Schwimmend |
| 7 | Schwimmend |
| 8 | Versorgungsspannung (0 bis 10) V |
| 9 | Analoger Ausgang (0 bis 10) V |
| 10 | RS-485 B (+) |
| 11 | SP2 Com |
| 12 | SP1 Quelle |
| 13 | Schwimmend |
| 14 | Schwimmend |
| 15 | Versorgungsspannung (-) |
| *0S1<CR> | Vakuummessung ablesen |
| *0R1<CR> | Maßeinheiten lesen |
| *0R2<CR> | SP1L und SP1H lesen |
Angenommen, Adresse 0
Eine vollständige Liste der Befehle finden Sie in der Bedienungsanleitung.
Der MX2A hat zwei Schaltpunkte. Sollwert 1 ist ein N-Kanal 60 V MOSFET mit offenem Kollektor. Er hat eine maximale Strombelastbarkeit von 1 A. Das Datenblatt finden Sie unter www.vishay.com/en/product/69958.
Schaltpunkt 2 ist ein Relais mit einer maximalen Schaltspannung von 220 V DC (250 V AC) und einem maximalen Schaltstrom von 2 A. Das Datenblatt finden Sie unter www.te.com/catalog/pn/en/1393788-3.
| MX2A PN: -110, -116, -125 | MX2A PN: Alle anderen |
| Nickel | Nickel |
| Glas | Glas |
| Gold | Gold |
| Tophet | Tophet |
| Cupron | Cupron |
| Lötmittel | Rostfreier Stahl |
| Gehäuse | Aluminium |
| Elektrische Anschlüsse | D-Sub 15-polig männlich |
| Gewicht mit Sensor (typisch) | 345 g (0,76 lbs) |
| Gewicht ohne Sensor | 181 g (0,40 lbs) |
| Zertifiziert nach CAN/CSA C22.2 Nr. 61010-1-12 |
| CE-zertifiziert nach EN 61010-1, EN 61236-1, EN 55011 |
| RoHS-konform |
| IP40 |
| EAC-zertifiziert |
| ISO 17025 akkreditierte Kalibrierung optional |
| NIST-rückführbare Kalibrierung optional |
Produkt-Dokumentation
| MX2A-Datenblatt |
| MX2A-Bedienungsanleitung |
| Televac®️ Vakuum-Kalibrierungstoleranzen |
3D-Modelle (STEP-Dateien)
| 2-8910-101 - MX2A 1/8″ NPT aus Edelstahl |
| 2-8910-110 - MX2A 1/8″ NPT Messing vernickelt |
| 2-8910-116 - MX2A NW16/KF16 Vernickeltes Messing |
| 2-8910-130 - MX2A NW16/KF16 Edelstahl |
Anwendungshinweise
Videos
| MX2A Produktübersicht Video |
| MX2A-Demonstrationsvideo |
| Video zum Austausch des MX2A-Sensors |
Werkzeuge
| Televac® Vakuum-Messumformer |
| Serielles Web-Terminal |
Broschüren
STEP-Datei herunterladen
| Teilenummer | Beschreibung | STEP-Datei |
| 2-8910-101 | MX2A 1/8″ NPT aus Edelstahl | Herunterladen |
| 2-8910-110 | MX2A 1/8″ NPT Vernickeltes Messing | Herunterladen |
| 2-8910-116 | MX2A NW16/KF16 Vernickeltes Messing | Herunterladen |
| 2-8910-130 | MX2A NW16/KF16 Rostfreier Stahl | Herunterladen |
MX2A Thermoelement Aktiv-Vakuum
Manometer Mengenrabatte
| Menge | Rabatt |
| 1 | Liste |
| 5 | 2% |
| 10 | 5% |
| 15 | 7% |
| 20 | 10% |
| 25 | 13% |
| 30+ | 15% |
D-Sub 15 Kabel Mengenrabatte
| Menge | Rabatt |
| 1 | Liste |
| 50 | 5% |
| 75 | 10% |
| 100+ | 15% |