XacTorr® Series Capacitance Manometer by Brooks Instrument

下载数据表

Model: CMX1

Part Numbers: X-XXXX-XXX, X-XXXX-XXX, X-XXXX-XXX, X-XXXX-XXX,

Compatible With: MX200, MX200 EthernetIP, MX200 PROFINET, MX Active Gauge EthernetIP Gateway

特点和优点。

  • Lower drift, superior protection from deposition of process gases/li>
  • Elimination of manual potentiometers and drift associated with electronics
  • Fast warm-up, close temperature control, rapid response to changes
  • Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
  • Cannot be zeroed if pressure is too high or desired temperature not reached
  • Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.

The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.

购买

XacTorr® Capacitance Manometer

产品介绍
价格
校准
数量
0.1 Torr, KF25/NW25 Stainless Steel Model: CMX1
0.1 Torr, KF25/NW25 Stainless Steel Model: CMX1
PN: X-XXXX-XX1
$1,300.00

10 Torr, KF25/NW25 Stainless Steel Model: CMX1
10 Torr, KF25/NW25 Stainless Steel Model: CMX1
PN: X-XXXX-XX2
$1,300.00

1000 Torr, KF25/NW25 Stainless Steel Model: CMX1
1000 Torr, KF25/NW25 Stainless Steel Model: CMX1
PN: X-XXXX-XX3
$1,300.00

电容式隔膜测量仪（CDG）电缆

产品介绍
价格
数量
10' D-Sub 15针（DB15）电缆
10' D-Sub 15针（DB15）电缆
PN: 2-9815-010
$175.00
20'D-Sub 15针（DB15）电缆
20'D-Sub 15针（DB15）电缆
PN: 2-9815-020
$195.00
35' D-Sub 15针（DB15）电缆
35' D-Sub 15针（DB15）电缆
PN: 2-9815-035
$205.00
50' D-Sub 15针（DB15）电缆
50' D-Sub 15针（DB15）电缆
PN: 2-9815-050
$235.00
65' D-Sub 15针（DB15）电缆
65' D-Sub 15针（DB15）电缆
PN: 2-9815-065
$270.00
50' 飞线电缆
50' 飞线电缆
PN: 2-9816-050
$235.00

规格

Product Type Capacitance Manometer
Differentiator Heated or Unheaded
Analog or Digital
溫度 45 °C
Pressure Range 0.1, 10, and 1000 Torr
准确度  
1 to 1000 Torr 0.15% of reading
< 1 Torr 0.25% of reading
测量范围 4 decades
Temperature Effect  
On zero 0.002% FS / °C
On span 0.02% FS / °C
Exposed Materials Inconel® and/or AISI 316L Stainless Steel
过压 17 psia or 125% of full scale, whichever is greater
Size Large
Analog Communications 0 to 10 V DC, 5k Ohm load
数字通信 DeviceNet™
RS-485
Electrical Connection
Analog/RS-485 9 Pin or 15 Pin D-Sub Connector
DeviceNet™ 5-Pin "M12" connector
Power Supply/Consumption
Power input at initial warm-up (analog) 270 mA @ ±15 V DC
Power input at steady state (analog) 175 mA @ ±15 V DC
15 pin male Sub D model requires an additional 40 mA to power the internal relays (if energized).
Certifications/Approvals
EMC Fully CE Certified to EMC Directive 89/336/EEC
Televac® 热电偶有源真空计的模拟输出行为图。
针脚 说明
1 模拟输出（接地）
2 RS-485 A (-)
3 SP2 NC
4 SP2 NO
5 SP1 开路漏极
6 浮动
7 浮动
8 电源电压（0 至 10）V
9 模拟输出（0 至 10） V
10 RS-485 B (+)
11 SP2 Com
12 SP1 数据源
13 浮动
14 浮动
15 电源电压 (-)
Televac® MX2A 热电偶有源真空计的电气连接（引脚分配）示意图。
*0S1<CR> 读取真空测量值
*0R1<CR> 读取测量单位
*0R2<CR> 读取 SP1L 和 SP1H

假设地址为 0

完整的命令列表请参见使用手册。

MX2A 有两个设置点。设置点 1 是一个 N 沟道 60 V MOSFET 开路集电极。其最大额定电流为 1 A。数据表可在www.vishay.com/en/product/69958 上找到。

设置点 2 是一个继电器，其最大开关电压为 220 V 直流（250 V 交流），最大开关电流为 2 A。数据表可在www.te.com/catalog/pn/en/1393788-3 上找到。

MX2A PN：-110、-116、-125 MX2A PN：所有其他
镍 镍
玻璃 玻璃
金色 金色
托菲特 托菲特
Cupron Cupron
焊接 不锈钢
住房 铝合金
电气连接 D-Sub 15 针公头
带传感器重量（典型值） 345 克（0.76 磅）
不含传感器的重量 181 克（0.40 磅）
Televac® MX2A 热电偶有源真空计的尺寸图。
通过 CAN/CSA C22.2 第 61010-1-12 号认证
通过 CE 认证，符合 EN 61010-1、EN 61236-1、EN 55011 标准
符合 RoHS 标准
IP40
通过 EAC 认证
可选择 ISO 17025 认证的校准
可选择NIST可追溯校准

三维模型

下载 STEP 文件

部件号 说明 STEP 文件
2-8910-101 MX2A 1/8″ NPT 不锈钢 下载
2-8910-110 MX2A 1/8″ NPT 镀镍黄铜 下载
2-8910-116 MX2A NW16/KF16 镀镍黄铜 下载
2-8910-130 MX2A NW16/KF16 不锈钢 下载

MX2A 有源真空热电偶
真空计数量折扣

数量 折扣
1 列表
5 2%
10 5%
15 7%
20 10%
25 13%
30+ 15%

D-Sub 15 电缆数量折扣

数量 折扣
1 列表
50 5%
75 10%
100+ 15%