XacTorr® Series Capacitance Manometer by Brooks Instrument

Download Datasheet

Model: CMX1

Part Numbers: X-XXXX-XXX, X-XXXX-XXX, X-XXXX-XXX, X-XXXX-XXX,

Compatible With: MX200, MX200 EthernetIP, MX200 PROFINET, MX Active Gauge EthernetIP Gateway

Features and Benefits:

  • Lower drift, superior protection from deposition of process gases
  • Elimination of manual potentiometers and drift associated with electronics
  • Fast warm-up, close temperature control, rapid response to changes
  • Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
  • Cannot be zeroed if pressure is too high or desired temperature not reached
  • Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.

The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.

Purchase

XacTorr® Capacitance Manometer

Product Description
Price
Calibration
Quantity
0.1 Torr, KF25/NW25 Stainless Steel Model: CMX1
0.1 Torr, KF25/NW25 Stainless Steel Model: CMX1
PN: 2-2105-10X-1
$2,815.00

10 Torr, KF25/NW25 Stainless Steel Model: CMX1
10 Torr, KF25/NW25 Stainless Steel Model: CMX1
PN: 2-2105-102
$2,815.00

1000 Torr, KF25/NW25 Stainless Steel Model: CMX1
1000 Torr, KF25/NW25 Stainless Steel Model: CMX1
PN: 2-2105-10X-2
$2,815.00

Capacitance Manometer Cables

Product Description
Price
Quantity
10' D-Sub 15 Pin (DB15) Cable
10' D-Sub 15 Pin (DB15) Cable
PN: 2-9815-010
$175.00
20' D-Sub 15 Pin (DB15) Cable
20' D-Sub 15 Pin (DB15) Cable
PN: 2-9815-020
$195.00
35' D-Sub 15 Pin (DB15) Cable
35' D-Sub 15 Pin (DB15) Cable
PN: 2-9815-035
$205.00
50' D-Sub 15 pin (DB15) Cable
50' D-Sub 15 pin (DB15) Cable
PN: 2-9815-050
$235.00
65' D-Sub 15 Pin (DB15) Cable
65' D-Sub 15 Pin (DB15) Cable
PN: 2-9815-065
$270.00
50' Flying Leads Cable
50' Flying Leads Cable
PN: 2-9816-050
$235.00

Specifications

Product Type Capacitance Manometer
Differentiator Heated
Analog or Digital
Temperature 45 °C
Pressure Range 0.1, 10, and 1000 Torr
Accuracy
1 to 1000 Torr 0.15% of reading
< 1 Torr 0.25% of reading
Measurement Range 4 decades
Temperature Effect
On zero 0.002% FS / °C
On span 0.02% FS / °C
Overpressure 17 psia or 125% of full scale, whichever is greater
Size Large
Analog Communications 0 to 10 V DC, 5k Ohm load
Electrical Connection
Analog/RS-485 15 Pin D-Sub Connector
Power Supply/Consumption
Power input at initial warm-up 270 mA @ ±15 V DC
Power input at steady state 175 mA @ ±15 V DC
Pin Description
1 Temperature Status
2 Pressure Output
3 Remote Zero
4 Not Used
5 Power Supply Common
6 -15 V DC Supply
7 +15 V DC Supply
8 Relay 1 (Normally Open)
9 Relay 1 (Common)
10 Relay 1 (Normally Closed)
11 Relay 2 (Normally Open)
12 Signal Common
13 Relay 2 (Common)
14 Relay 2 (Normally Closed)
15 Case Ground
Diagram of the electrical connections (pinout) for the Brooks Instrument CMX1 Capacitance Manometer Vacuum Gauge
Inconel® and/or AISI 316L Stainless Steel
Electrical Connections D-Sub 15-pin male
Height 145.5 mm (5.73")
Width 77.4 mm (3.05")
Weight 726 g (1.4) lbs
Dimensional drawing of the Televac® MX2A Thermocouple Active Vacuum Gauge.
Fully CE Certified to EMC Directive 89/336/EEC
NIST traceable calibration optional